Ion Beam Milling and Etching Equipment - Hakuto/Ns
We propose the optimal dry etching equipment for processing difficult-to-etch materials such as Au, Pt, and magnetic materials!
Ion beam milling equipment is used as a fine processing device in dry processes, with a wide range of applications from research and development to production. Due to its physical etching process that does not involve chemical reactions, materials such as Au, Pt, magnetic materials, and metal multilayers can be easily processed. 【Features】 (1) Capable of fine processing difficult-to-etch materials (2) Metal multilayers can be processed in a one-step process (3) The self-rotating stage allows for uniform simultaneous processing of multiple wafers (4) The substrate cooling stage (water-cooled or water/gas-cooled) suppresses substrate temperature rise, preventing resist burning (5) The variable stage angle makes taper processing easy (anisotropic etching)
- Company：伯東 本社
- Price：Other
